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Hardware Security
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High precision 5-axis-CNC-milling with integrated sensor for layer thickness |
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Infared (IR) laser system |
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"IntlVac Nanoquest I" ion beam etching system for homogeneous and high precision processing and ablation of single IC metall layers |
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"Raith 150 Two" scanning electron microscope (SEM) for chip scanning |
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"Raith Velion" dual-beam FIB/SEM system for precise processing and modification of IC's |
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Further equipment for processing and process control |
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